• ELEN E6945x or y Device nanofabrication 3 pts. Lect: 3. Prerequisites: ELEN E3106 and E3401, or equivalents. Recommended: ELEN E4944. This course provides an understanding of the methods used for structuring matter on the nanometer length: thin-film technology; lithographic patterning and technologies including photon, electron, ion and atom, scanning probe, soft lithography, and nanoimprinting; pattern transfer; self-assembly; process integration; and applications.

    Course
    Number
    Call Number/
    Section
    Days & Times/
    Location
    Instructor Enrollment
    Autumn 2014 :: ELEN E6945
    ELEN
    6945
    27800
    001
    Tu 1:10p - 3:40p
    535 SEELEY W. MUDD BUILDING
    S. Wind 33 [ More Info ]